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755737

Sigma-Aldrich

Tungsten hexacarbonyl

packaged for use in deposition systems

Synonym(s):

Tungsten hexacarbonyl, Hexacarbonyltungsten (0), Tungsten carbonyl, Tungstenhexacarbonyl

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About This Item

Linear Formula:
W(CO)6
CAS Number:
14040-11-0
Molecular Weight:
351.90
EC Number:
237-880-2
MDL number:
MFCD00011462
UNSPSC Code:
12352300
PubChem Substance ID:
329766135
NACRES:
NA.23

vapor density

12.1 (vs air)

Quality Level

100

vapor pressure

1.2 mmHg ( 67 °C)

assay

99.9% (trace metals analysis)

form

solid

purified by

sublimation

reaction suitability

core: tungsten

mp

150 °C (lit.)

density

2.65 g/mL at 25 °C (lit.)

SMILES string

[W].[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+]

InChI

1S/6CO.W/c6*1-2;

InChI key

FQNHWXHRAUXLFU-UHFFFAOYSA-N

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Application

Tumgstenhexacarbonyl is a volatile, air stable precursor of Tungsten(0), widely used in ALD and CVD techniques.

pictograms

Skull and crossbones
GHS06

signalword

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 3 Oral

Storage Class

6.1D - Non-combustible, acute toxic Cat.3 / toxic hazardous materials or hazardous materials causing chronic effects

wgk_germany

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

Certificates of Analysis (COA)

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Mulders, J. J. L.; Belova, L. M.; Riazanova, A.
Nanotechnology, 22, 055302/1-055302/1 (2011)
Maruyama, T., Arai, S.
Journal of the Electrochemical Society, 4, 1021-1021 (1994)
F Porrati et al.
Nanotechnology, 20(19), 195301-195301 (2009-05-08)
W-based granular metals have been prepared by electron-beam-induced deposition from the tungsten hexacarbonyl W(CO)(6) precursor. In situ electrical conductivity measurements have been performed to monitor the growth process and to investigate the behavior of the deposit under electron beam post-irradiation
S Martin et al.
The Journal of chemical physics, 134(3), 034304-034304 (2011-01-26)
We have studied the excitation and dissociation processes of the molecule W(CO)(6) in collisions with low kinetic energy (3 keV) protons, monocharged fluorine, and chlorine ions using double charge transfer spectroscopy. By analyzing the kinetic energy loss of the projectile
Lei Li et al.
Journal of the American Society for Mass Spectrometry, 15(1), 87-102 (2003-12-31)
The internal energy distributions, P(epsilon), of a millisecond pulsed radio frequency glow discharge plasma were investigated using tungsten hexcarbonyl W(CO)(6) as a "thermometer molecule". Vapor of the probe molecule, W(CO)(6), was introduced into the plasma and subjected to various ionization
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